JPH0253041U - - Google Patents
Info
- Publication number
- JPH0253041U JPH0253041U JP13090088U JP13090088U JPH0253041U JP H0253041 U JPH0253041 U JP H0253041U JP 13090088 U JP13090088 U JP 13090088U JP 13090088 U JP13090088 U JP 13090088U JP H0253041 U JPH0253041 U JP H0253041U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- resin
- pins
- jig
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13090088U JPH0253041U (en]) | 1988-10-07 | 1988-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13090088U JPH0253041U (en]) | 1988-10-07 | 1988-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0253041U true JPH0253041U (en]) | 1990-04-17 |
Family
ID=31386478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13090088U Pending JPH0253041U (en]) | 1988-10-07 | 1988-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0253041U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006005023A (ja) * | 2004-06-15 | 2006-01-05 | Dainippon Printing Co Ltd | インプリント方法、インプリント装置とその型部材、および該インプリント方法を用いた半導体素子形成のためのパターニング方法。 |
-
1988
- 1988-10-07 JP JP13090088U patent/JPH0253041U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006005023A (ja) * | 2004-06-15 | 2006-01-05 | Dainippon Printing Co Ltd | インプリント方法、インプリント装置とその型部材、および該インプリント方法を用いた半導体素子形成のためのパターニング方法。 |